METHOD FOR MONITORING THE ENERGY DENSITY OF A LASER BEAM BY IMAGE ANALYSIS AND CORRESPONDING DEVICE

摘要

A method for monitoring the energy density of a laser beam using parameters of the laser beam including regularly applying the laser beam to a reference substrate and measuring, with each application, the resulting light intensity; identifying a change in the light intensity on the reference substrate between at least two measurements; and, when the change in the light intensity is higher than a predetermined threshold, determining the unstable parameter or parameters of the energy density of the laser beam.