SYSTEM FOR FORMING A THIN-FILM PHOSPHOR LAYER FOR PHOSPHOR-CONVERTED LIGHT EMITTING DEVICES

摘要

For system on substrate to form film fluorescence bisque, the system comprises deposit subsystems to define that shell accommodates substrate; A kind of fluorescent powder transport subsystem is configured to convey, using carrier gas, fluorescent powder, fluorescent powder from source to deposit subsystem; Polymer transport subsystem is configured to polymer precursor in gas phase and deposit subsystem; With control subsystem and deposit subsystem, the fluorescent powder transport subsystem, with polymer precursor transport subsystem, wherein the control subsystem is configured to control fluorescent powder transport subsystem for the fluorescent powder and deposit subsystem first time interval, adjacent substrate forms phosphor powder layer, and control subsystem is configured to control the polymer precursor transport subsystem and comes delivery polymer precursor and deposit subsystem in the second time interval with phosphor layer that form polymeric layer adjacent.