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METHOD OF ANALYZING DEFORMATIONS IN A LAMINATED OBJECT AND ACCORDING SYSTEM

机译:分层物体和记录系统中的变形分析方法

摘要

The present invention relates to a method of analyzing a laminated object and to a system for analyzing a laminated object. Illustrative embodiments herein relate to optical interferometry techniques for non-destructively analyzing laminated objects with large surface utilized to obtain data relating to the topography of an object under examination and to further process the obtained topographical data so as to identify type and/or severity and/or position of surface defects.
机译:本发明涉及一种分析层叠物体的方法和一种用于分析层叠物体的系统。本文的说明性实施例涉及光学干涉术技术,其用于非破坏性地分析具有大表面的层压物体,该光学干涉技术用于获得与被检查物体的形貌有关的数据,并进一步处理所获得的形貌数据以便识别类型和/或严重性和/或或表面缺陷的位置。

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