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METHOD OF ANALYZING DEFORMATIONS IN A LAMINATED OBJECT AND ACCORDING SYSTEM
METHOD OF ANALYZING DEFORMATIONS IN A LAMINATED OBJECT AND ACCORDING SYSTEM
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机译:分层物体和记录系统中的变形分析方法
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摘要
The present invention relates to a method of analyzing a laminated object and to a system for analyzing a laminated object. Illustrative embodiments herein relate to optical interferometry techniques for non-destructively analyzing laminated objects with large surface utilized to obtain data relating to the topography of an object under examination and to further process the obtained topographical data so as to identify type and/or severity and/or position of surface defects.
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