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IMAGING DETECTOR COMPRISING A VACUUM TUBE HOUSING COMPRISING A PLURALITY OF INTERMEDIATE PLANAR PLATES HAVING NON-MONOTONICALLY APERTURE ARRANGEMENT
IMAGING DETECTOR COMPRISING A VACUUM TUBE HOUSING COMPRISING A PLURALITY OF INTERMEDIATE PLANAR PLATES HAVING NON-MONOTONICALLY APERTURE ARRANGEMENT
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机译:包含真空管外壳的成像探测器,该真空管包含多个具有非单调孔径布置的中间平面板
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摘要
A housing for microelectronic devices requiring an internal vacuum for operation, e.g., an image detector, is formed by tape casting and incorporates leads between interior and exterior of the housing where the leads are disposed on a facing surface of green tape layers. Adjacent green tape layers having corresponding apertures therein are stacked on a first closure member to form a resulting cavity and increased electrical isolation or channel sub-structures are achievable by forming adjacent layers with aperture dimension which vary non-monotonically. After assembly of the device within the cavity, a second closure member is sealed against an open face of the package in a vacuum environment to produce a vacuum sealed device.
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