首页> 外国专利> A COMMON-PATH INTERFEROMETRIC SCATTERING IMAGING SYSTEM AND A METHOD OF USING COMMON-PATH INTERFEROMETRIC SCATTERING IMAGING TO DETECT AN OBJECT

A COMMON-PATH INTERFEROMETRIC SCATTERING IMAGING SYSTEM AND A METHOD OF USING COMMON-PATH INTERFEROMETRIC SCATTERING IMAGING TO DETECT AN OBJECT

机译:共路径干涉光散射成像系统和使用目标物的方法

摘要

The present invention relates to a common-path interferometric scattering imaging system and a method of using such a system, where the system comprises: - illuminating means for emitting an illumination beam (L 0 ); - light collecting means for collecting through a common collection optical path: - a scattered beam (L s ) provided by the light scattering on an object (T) of the illumination beam (L 0 ); and - a reference beam (L r ) provided by the reflection on or transmission through an interface (I) of the illumination beam (L 0 ); - image sensing means (D) for receiving and sensing the collected scattered (L s ) and reference (L r ) beams interfering thereon as an interferometric light signal; - attenuation means arranged in the common collection optical path for attenuating the reference beam (L r ) before it arrives at the image sensing means (D); and - processing means (P) to process data corresponding to the interferometric light signal.
机译:本发明涉及共路径干涉散射成像系统和使用该系统的方法,其中该系统包括:-用于发射照明光束(L 0)的照明装置;-用于通过公共收集光路进行收集的聚光装置:-由光散射在照明光束(L 0)的物体(T)上提供的散射光束(L s);和-通过在照明光束(L 0)的界面(I)上的反射或透射而提供的参考光束(L r);-图像感测装置(D),用于接收和感测在其上干涉的所收集的散射光束(L s)和参考光束(L r)作为干涉光信号;-布置在公共收集光路中的衰减装置,用于在参考光束到达图像传感装置(D)之前对其进行衰减;和-处理装置(P),以处理与干涉光信号相对应的数据。

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