MEASUREMENT DEVICE AND METHOD FOR SPECTRAL RESPONSIVITY OF LARGE-APERTURE RADIOMETER

摘要

The present invention relates to the field of optical metrology test, in particular to a device and method of measuring the spectral responsivity of a large-diameter radiometer, wherein the monochromatic light is generated by a monochromator, then enters a small-diameter integrating sphere and finally is beam expanded by a collimation system to generate the large-diameter uniform monochromatic parallel light, thus realizing the measurement of the spectral responsivity of the large-diameter radiometer with the small-diameter beam scanning detection method. Compared with the prior arts, the present invention can realize the measurement of the absolute spectral responsivity of the large-diameter radiometer with the small-diameter beam scanning detection method and can also realize the measurement of the spectral responsivity of the measured large-diameter radiometer with the comparison method based on the established standard large-diameter radiometer, bringing a simple measurement process and convenient experiment, thereby greatly reducing the measurement duration.