CROSS-SECTIONAL PROCESSING OBSERVATION APPARATUS, CROSS-SECTIONAL PROCESSING OBSERVATION METHOD, AND PROGRAM

摘要

To improve a measurement accuracy of a form of a sample.SOLUTION: A cross-sectional processing observation apparatus comprises: a sample stage of holding a sample; a focused ion beam telescope applying a focused ion beam to the sample; an electron beam telescope applying an electron beam to the sample in a direction orthogonal to a direction to which the focused ion beam is applied; an electron detector detecting a secondary electron or a reflection electron occurred from the sample; an irradiation position control part controlling an irradiation position of the focused ion beam and the electron beam on the basis of irradiation target position information stored in a storage part indicating an irradiation target position of a beam to the sample; a step control part that controls a cross-sectional exposure step of exposing a cross section of the sample by applying the focused ion beam to the sample, and a cross section image acquisition step of acquiring a cross section image of the cross section by applying the electron beam to the cross section in each irradiation position by the irradiation position control part; and an image quality correction part that corrects an image quality of the cross section image acquired in the irradiation position.SELECTED DRAWING: Figure 1