GLOW DISCHARGE SYSTEM AND ION EXTRACTION STRUCTURE THEREOF, AND GLOW DISCHARGE MASS SPECTROMETER

摘要

To provide a glow discharge mass spectrometer with higher analysis accuracy by increasing the amount of extracted ion beams without significantly changing the device configuration and drive conditions of the conventional glow discharge systems.SOLUTION: In an ion extraction structure of a glow discharge system, an extraction plate 25 disposed at an ion extraction port of a discharge cell 20 and acting as an extraction electrode includes: a first plate 26 having, in an opening 25, a projecting portion 26a projecting toward a discharge area 27 and disposed on a discharge area 27 side; and a second plate 28 connected to the first plate 26 on an outer peripheral edge and disposed through a gap on an opening 25 side.SELECTED DRAWING: Figure 1