POSITION DETECTING DEVICE OF SEMICONDUCTOR WAFER AND POSITION DETECTING METHOD OF SEMICONDUCTOR WAFER, AND POSITIONING DEVICE OF SEMICONDUCTOR WAFER AND POSITIONING METHOD OF SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To provide an art capable of detecting a position of a semiconductor wafer in which a modifying layer to make the semiconductor wafer be divided into a plurality of flaky substances when external force is applied is formed inside.;SOLUTION: A positioning device of a semiconductor wafer WF comprises: supporting means 20 for supporting a semiconductor wafer WF; a position detecting device 30 for detecting a position of the semiconductor wafer WF; and transferring means 40 for arranging the semiconductor wafer WF on a predetermined position based on the detection result of the position detecting device 30. The semiconductor wafer WF has a modifying layer AL inside to make the semiconductor wafer WF be divided into a plurality of flaky substances when external force is applied. The position detecting device 30 comprises: transmitting means 31 for transmitting sound waves to the semiconductor wafer WF; receiving means 32 for receiving sound waves transmitted to the semiconductor wafer WF by the transmitting means 31; and analyzing means 33 for detecting conditions of the modifying layer AL from the sound waves received by the receiving means 32 to detect a position of the semiconductor wafer WF from the detection result.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT