MAGNIFICATION INSPECTION WORK, MAGNIFICATION INSPECTION METHOD, AND OPTICAL MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a magnification inspection work, a magnification inspection method, and an optical measuring device, which allow a user to accurately and easily set magnification of a lens.;SOLUTION: An inspection pattern 42 for a magnification inspection work includes a reference line 43 in a straight line passing through a reference point co, and a spiral part 44 extended spirally from the reference point co. A magnification inspection work is fitted to an optical measuring device, an inspection image including an inspection pattern is detected by the optical measuring device, an inspection circle 45 in a radius equal to n pieces of integer of a pixel size dp is drawn on the detected inspection image, an intersection cc of the inspection circle 45 and the spiral part 44 is detected by the inspection image, an angle θc relative to the reference line 43 with the reference point co of the intersection cc as a center is detected, distance rc between the intersection cc and the reference point co on the inspection pattern 42 is calculated from the detected angle θc, and magnification of an objective lens is calculated from the calculated distance rc, a number-of-pixels n of the radius of the inspection circle 45, and the pixel size dp of the optical measuring device.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2019,JPO&INPIT