HARDNESS SENSOR, HARDNESS SENSOR ARRAY AND HARDNESS DETECTION METHOD

摘要

To provide a small-sized sensor having high precision.SOLUTION: The hardness sensor comprises: a substrate including a plurality of openings having different opening areas; a plurality of strain sensor parts attached to respective end portions of the plurality of openings so that the same surface as the upper surface of the substrate faces up and deformed by a pressing force from the upper surface side; and an elastic member attached so that the lower surface contact the upper surface of the substrate in a film shape and having the upper surface constituting a pressing surface to be measured. The hardness detection method comprises: pressing an object to be measured on the pressing surface of the elastic member; detecting the deformations of the plurality of strain sensor parts before and after the pressing; and deriving the Young's modulus E of the object to be measured using a strain ratio r to the deformation.SELECTED DRAWING: Figure 1