DIAMOND STRUCTURE, DIAMOND CANTILEVER, AND MANUFACTURING METHOD OF DIAMOND STRUCTURE

摘要

To provide an MEMS/NMES diamond structure such as a cantilever or a mechanical resonator which has an extremely-high quality factor and has little performance degradation even at high temperatures, and a manufacturing method thereof.SOLUTION: In a diamond structure having a beam structure in which a diamond beam is formed on a single crystal diamond layer via a support, the beam is composed of a surface defect layer and a body layer, the surface defect layer is composed of diamond-like carbon, the thickness is 2% or less of the thickness of the body layer, and the body layer is composed of single crystal diamond. A manufacturing method of the diamond structure includes ion implantation into the single crystal diamond, diamond epitaxial layer formation, heat treatment, etching mask formation, dry etching, wet etching, and defect layer etching.SELECTED DRAWING: Figure 1