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DILUTED SOLUTION MANUFACTURING METHOD AND DILUTED SOLUTION MANUFACTURING APPARATUS

机译:稀溶液制造方法和稀溶液制造装置

摘要

To continuously and stably manufacture a diluted solution adjusted in a prescribed concentration.SOLUTION: A diluted solution manufacturing method includes: a step of supplying a first liquid to a first pipe 11; a step of adding a second liquid in a tank 12a to the first liquid flowing in the first pipe 11 via a second pipe 13; a step of measuring the first liquid flowing in the first pipe 11 or a flow amount of a diluted solution; a step of measuring a concentration of the diluted solution; and a step of adjusting an adding amount of the second liquid to the first liquid so that the concentration of the diluted solution becomes a prescribed concentration. The step of adjusting the adding amount of the second liquid is switched to a first adjustment mode for adjusting the adding amount of the second liquid on the basis of the flow amount and the concentration measured and a second adjustment mode for adjusting the adding amount of the second liquid on the basis of the flow amount and the concentration measured, and executes the adjustment of the adding amount of the second liquid. The switching from the first adjustment mode to the second adjustment mode is performed when the flow amount measured satisfies a prescribed condition.SELECTED DRAWING: Figure 1
机译:为了连续且稳定地制造调节到规定浓度的稀释溶液。稀释溶液制造方法包括:将第一液体供应到第一管道11的步骤;通过第二配管13向第一配管11中流动的第一液体添加罐12a中的第二液体的步骤。测量在第一管11中流动的第一液体或稀释溶液的流量的步骤;测量稀释溶液浓度的步骤;调整第二液体向第一液体中的添加量以使稀释液的浓度达到规定浓度的步骤。调节第二液体的添加量的步骤被切换到用于基于所测量的流量和浓度来调节第二液体的添加量的第一调节模式以及用于调节第二液体的添加量的第二调节模式。基于所测量的流量和浓度的第二液体,并执行第二液体的添加量的调节。当测得的流量满足规定条件时,执行从第一调整模式到第二调整模式的切换。

著录项

  • 公开/公告号JP2019169521A

    专利类型

  • 公开/公告日2019-10-03

    原文格式PDF

  • 申请/专利权人 JAPAN ORGANO CO LTD;

    申请/专利号JP20180054405

  • 发明设计人 YAMASHITA KOFUKU;MORINO SHOTA;

    申请日2018-03-22

  • 分类号H01L21/304;

  • 国家 JP

  • 入库时间 2022-08-21 12:23:59

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