試料解析方法

摘要

To provide a sample analysis method capable of analyzing a surface of a sample chronologically with high resolution, by using an electron beam device while introducing hydrogen into the sample as well as applying stress thereto.SOLUTION: A sample analysis method uses an electron beam device 100 configured to irradiate a surface 11a of a sample 11 with an electron beam and to measure one or more kinds selected from an electron and an X-ray emitted from the surface 11a. The sample analysis method includes: a step of irradiating the surface 11a with the electron beam in a state where the surface 11a is exposed to a hydrogen-containing atmosphere inside the electron beam device 100; and a step of applying stress to the sample 11.SELECTED DRAWING: Figure 1