ADHESION STRENGTHENING PROCESSING APPARATUS AND ADHESION STRENGTHENING PROCESSING METHOD

摘要

To provide an adhesion strengthening processing apparatus and an adhesion strength processing method capable of uniformly applying an adhesion enhancing agent to a treated surface of a substrate.SOLUTION: Pressure in a processing space is reduced due to discharge of a gas from the processing space. An inert gas is supplied to the processing space while the gas is being discharged from the processing space such that the pressure in the processing space is an intermediate value P4 lower than the atmospheric pressure. After the supply of the inert gas, an adhesion strengthening gas containing an adhesion strengthening agent is supplied to the processing space while the gas is being discharged from the processing space such that the pressure in the processing space becomes an intermediate value P5 lower than atmospheric pressure.SELECTED DRAWING: Figure 4