To provide an imprint device advantageous in suppression of the distortion of a molding.SOLUTION: An imprint device comprises: a first measurement part 211 that measures a temperature of a substrate; a first adjust part 212 that adjusts the temperature of the substrate; a second measurement part 221 that measures the temperature of a molding; a second adjustment part 222 that adjusts the temperature of the molding; and a control part 160 that controls the first adjustment part so that a first measurement result acquired from the first measurement part is close to a first target temperature, and controls the second adjustment part so that a second measurement result acquired from the second measurement part is close to a second target temperature. In a state where the substrate is contacted to the molding while controlling the first and second adjustment parts, any one of control of the first and second adjustment parts is stopped, and any one of the first and second target temperatures is changed on the basis of a difference between the first measurement result and the second measurement result acquired in the stopping state, and the first adjustment part and the second adjustment part are controlled.SELECTED DRAWING: Figure 2
展开▼
