REFLECTION CHARACTERISTIC MEASURING APPARATUS, PROCESSING SYSTEM, REFLECTION CHARACTERISTIC MEASURING METHOD AND OBJECT PROCESSING METHOD

摘要

To provide a technology for obtaining a reflection characteristic with higher reliability as a reflection characteristic of an object surface.SOLUTION: The reflection characteristic measuring apparatus comprises: acquisition means for acquiring a two-dimensional intensity distribution which shows an intensity distribution in a reflection angle direction and an azimuth direction of light reflected from an object surface; and calculation means for obtaining a reflection characteristic of the object surface on the basis of an intensity distribution in a normal direction different from the reflection angle direction in the two-dimensional intensity distribution.SELECTED DRAWING: Figure 2