MANUFACTURING METHOD OF SURFACE TREATMENT POWDER FOR THERMALLY-CONDUCTIVE GREASE AND SURFACE TREATMENT POWDER FOR THERMALLY-CONDUCTIVE GREASE

摘要

To provide a manufacturing method of surface treatment powder for thermally-conductive grease that has water resistance while keeping heat conductance and insulating property, and can improve wettability while controlling reactivity with organic resin.SOLUTION: A manufacturing method includes: a radicalization step S1 radicalizing silicon compound to get radicalized silicon compound by mixing reactant gas made plasma under atmospheric pressure and the silicon compound supplied through carrier gas; and a coating film formation step S3 forming coating film consisting of silicon nitride in the surface by reacting the radicalized silicon compound with a surface of aluminum nitride powder. In the coating film formation step, the average film thickness of the coating film is 1 to 100 nm and unevenness of the film thickness for the average film thickness is not more than 20%.SELECTED DRAWING: Figure 1