OPTICAL FILTER, OPTICAL FILTER MODULE, ANALYTICAL APPARATUS, AND OPTICAL APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an optical filter, an optical filter module, an analytical apparatus, and an optical apparatus, for obtaining a gap amount with good accuracy.;SOLUTION: An optical filter 10 includes: a first substrate 20; a second substrate 30; a first reflection film 40 provided on the first substrate; a second reflection film 50 provided on the second substrate; first and second electrodes 62 and 64 provided on the first substrate at positions in the periphery of the first reflection film as viewed in a plane; and third and fourth electrodes 72 and 74 provided on the second substrate and facing the first and second electrodes.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT