EVAPORATION SYSTEM, AND PROGRAM FOR EVAPORATION SYSTEM

摘要

To properly control supply of a liquid material without using a pressure sensor.SOLUTION: An evaporation system 100 includes an evaporator 21 to evaporate a liquid material, a supply rate controller 22 to control a supply rate of the liquid material to the evaporator 21, a flow-regulating valve 32 to regulate a flow rate of a gas generated from the evaporator 21, a flow rate sensor to measure the flow rate of the generated gas, and a valve controller 43 to control valve opening by outputting a drive signal to the flow-regulating valve 32 so that the flow rate measured by the flow rate sensor agrees with a predetermined flow rate. The system further includes a drive signal value receiver 44 to receive a drive signal value indicated by the drive signal and a supply controller 45 to control supply of the liquid material by outputting a control signal to the supply rate controller 22 based on the drive signal value.SELECTED DRAWING: Figure 3