CAUSAL RELATIONSHIP MODEL VERIFICATION METHOD AND SYSTEM, AND FAILURE CAUSE EXTRACTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a system effectively using a causal relation model obtained from manufacturing process data to facilitate verification based on domain knowledge.SOLUTION: Provided is a causal relationship model verification method in an information processor including an input device, a display device, a processor, and a storage device. Executed in this method is a first step of acquiring, from the input device or the storage device, quality data as a result of evaluation of a resulting product, monitor data indicating a parameter upon generation of the resulting product, and domain knowledge indicating mutual relationship between the quality data and the monitor data. Next, the processor executes a second step of, by using a causal relationship model construction condition acquired from the input device or the storage device where the quality data and the monitor data are provided as nodes, constructing a causal relationship model defining relationship between the nodes. Also executed is a third step of performing at least one of comparison processing performed by the processor and comparison display performed by the display device for the causal relationship model and the domain knowledge.SELECTED DRAWING: Figure 5