STRAIN GAUGE, AND, TRIAXIAL FORCE SENSOR

摘要

To provide a strain gauge and a triaxial force sensor in each of which the occurrence of measurement error attributable to a change of ambient temperature is suppressed.SOLUTION: A strain gauge 20 comprises a substrate 21 and a circuit pattern CP. The substrate 21 has a sensitive region 21s, non-sensitive regions 21n1, 21n2, and coupling regions 21c1, 21c2. The circuit pattern CP includes: strain sensitive elements X, Xand fixed resistance elements RX, RXconstituting a first Wheatstone bridge circuit; strain sensitive elements Y, Yand fixed resistance elements RY, RYconstituting a second Wheatstone bridge circuit; and two strain sensitive elements Z, Zconstituting a third Wheatstone bridge circuit. The strain sensitive elements X, X, Y, Y, Z, Zand the fixed resistance elements RX, RX, RY, RYare formed with the same material.SELECTED DRAWING: Figure 4