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Acceleration sensor core unit, method for preventing deflection of substrate on which acceleration sensor is mounted
Acceleration sensor core unit, method for preventing deflection of substrate on which acceleration sensor is mounted
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机译:加速度传感器核心单元,防止安装了加速度传感器的基板挠曲的方法
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摘要
PROBLEM TO BE SOLVED: To suppress bending of a substrate. An acceleration sensor core unit 1 includes a substrate 3 and metal plates 4 and 5. The substrate 3 is made of epoxy resin, and an acceleration sensor 11 for detecting vibration acceleration in the direction of the arrow 105 is mounted. The substrate 3 is sandwiched between the metal plates 4 and 5 in a sandwich manner. Ring-shaped metal spacers 7a to 7c are interposed between the substrate 3 and the metal plate 4, and ring-shaped metal spacers 8a to 8c are interposed between the substrate 3 and the metal plate 5, respectively. Since the substrate 3 and the metal plates 4 and 5 are screwed in three places, the substrate 3 can be fixed to the metal plates 4 and 5 with less space and with certainty. Thereby, the rigidity as the acceleration sensor core unit 1 can be secured. [Selected figure] Figure 2
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