METHOD FOR DIAGNOSING ABNORMAL STATE OF PROCESS AND ABNORMAL STATE DIAGNOSIS APPARATUS

摘要

To provide a method for diagnosing an abnormal state of a process and an abnormal state diagnosis apparatus capable of estimating the cause of an abnormal state having occurred in a process such as a manufacturing process.SOLUTION: In a method for diagnosing an abnormal state of a process, a deviation index from the normal state of the process is calculated using a plurality of submodels for predicting the state of a process, and the cause of an abnormal state that has occurred in the process is estimated based on a deviation index pattern set composed of the deviation index calculated for each submodel. The method for diagnosing an abnormal state of the process includes: a basis pattern creation step of creating, as a plurality of basis patterns, an abnormality pattern shown as a case where there is an abnormality in each of the variables relating as explanatory variables of the submodel in the deviation index pattern set; and an abnormality cause estimation step for estimating the cause of the abnormal state having occurred in the process on the basis of the basis pattern.SELECTED DRAWING: Figure 2