INTEGRATED MEMS LINEAR LINE AND ANGULAR ACCELERATION METER

摘要

To describe an electric machine system (MEMS) accelerometer.SOLUTION: A MEMS accelerometer can be configured to sense linear acceleration along one axis, a two-axis or a three-axis, and sense angular acceleration around the one axis, the two-axis or the three-axis. By so doing, the MEMS accelerometer can be functioned as an inertial accelerometer of the two-axis, the three-axis, the four-axis, the five-axis or the six-axis. According to several embodiments, the MEMS accelerometer may include a single mass connected to at least one anchor via a plurality of tethers. According to the other embodiments, the MEMS accelerometer may include a proof mass connected to at least one anchor via the plurality of tethers and one or more shuttle masses connected to the proof mass via a plurality of second tethers. Rotation and linear movement of the MEMS accelerometer can be sensed using an electrostatic capacitance sensor.SELECTED DRAWING: Figure 2