ANALYSIS SYSTEM AND INTRODUCTION DEVICE FOR FLOATING MATTERS IN VACUUM ATMOSPHERE

摘要

PROBLEM TO BE SOLVED: To take out and analyze floating matters in a vacuum atmosphere of a semiconductor manufacturing device.SOLUTION: The interior of an introduction tank 26 is evacuated to a degree of vacuum equal to or lower than a to-be-measured zone 22 by a vacuum pump 28. Next, floating matters in the to-be-measured zone 22 are received in the introduction tank 26 from the to-be-measured zone 22 on an exhaust line 14 of a vacuum chamber 12 through a connection pipe 24. Thereafter, a gas supply device 30 supplies a carrier gas to the inside of the introduction tank 26 to bring it into an atmospheric pressure atmosphere. Further, by using the carrier gas, the floating matters are sent to a component analyzer 32. In the component analyzer 32, for example, the particle size distribution of components of the floating matters is measured. The control device opens and closes the respective valves in a predetermined order for this control.SELECTED DRAWING: Figure 1