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Yield prediction device and yield prediction method

机译:产量预测装置及产量预测方法

摘要

PROBLEM TO BE SOLVED: To provide a technique that models a cause-effect relationship between manufacturing time data and quality data differing in sampling frequency in a form verifiable with knowledge concerning a physical cause-effect relationship to make it easier to reconstruct.SOLUTION: Provided is a yield prediction device comprising: a representative value calculation unit for calculating a representative value using operating performance record data of a manufacturing device of a product that includes a plurality of variables; a nested network estimation unit for estimating a nested network that is a nested relation between object variables represented by a representative value for each representative value in accordance with the presence of a predetermined cause-effect relation and the hierarchical relation of variables; a prediction simulation unit for simulating prediction of quality data by a prescribed resolution using the nested network; and an output information generation unit for generating output information that shows the cause-effect relation between variables and quality data using the result of prediction simulation.SELECTED DRAWING: Figure 1
机译:要解决的问题:提供一种技术,以一种可验证的有关物理因果关系的知识来对制造时间数据和采样频率不同的质量数据之间的因果关系进行建模,以使其更易于重构。是一种产量预测设备,包括:代表值计算单元,用于使用包括多个变量的产品的制造设备的运行性能记录数据来计算代表值;嵌套网络估计单元,用于根据预定的因果关系和变量的层次关系来估计作为代表值的对象变量之间的嵌套关系的嵌套网络;预测模拟单元,用于使用嵌套网络以规定的分辨率模拟质量数据的预测;图1是通过预测模拟的结果生成表示变量和质量数据之间的因果关系的输出信息的输出信息生成单元。

著录项

  • 公开/公告号JP6562851B2

    专利类型

  • 公开/公告日2019-08-21

    原文格式PDF

  • 申请/专利权人 株式会社日立製作所;

    申请/专利号JP20160029901

  • 发明设计人 今沢 慶;保刈 純平;

    申请日2016-02-19

  • 分类号G06Q10/04;G06Q50/04;G05B19/418;

  • 国家 JP

  • 入库时间 2022-08-21 12:20:23

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