PROBLEM TO BE SOLVED: To provide a thermal decomposition mechanism capable of sufficiently performing heat treatment for a processing-required object.;SOLUTION: In a thermal decomposition mechanism which includes a hot wind blowing chamber 1 and a processing-required object supply chamber 2, hot wind circulates from the hot wind blowing chamber 1 to the processing-required object supply chamber 2, and a part of the hot wind is discharged from the hot wind blowing chamber 1. The thermal decomposition device can perform heat treatment at two steps in the hot wind blowing chamber 1 and the processing-required object supply chamber 2, owing to including the hot wind blowing chamber 1 and the processing-required object supply chamber 2. Due to that hot wind circulates from the hot wind blowing chamber 1 to the processing-required object supply chamber 2, and a part of the hot wind is discharged from the hot wind blowing chamber 1, harmful gas which is generated in the processing-required object supply chamber 2 suffers from high temperature in the hot wind blowing chamber 1 and is then discharged.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT
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