Sensor device and flow rate measurement system for measuring fluid flow rate, flow rate measurement method

摘要

PROBLEM TO BE SOLVED: To provide a sensor device capable of accurately detecting a surface temperature of a flow path wall without being affected by heat of a heater.SOLUTION: A sensor device 1 for measuring a flow rate of fluid includes a film layer 10 stuck onto an outer surface of a flow path wall for forming a flow path in that the fluid flows, and a heater 15 provided on the film layer 10. In the film layer 10, a temperature sensor 16, which detects surface temperature of the flow path wall heated by the heater 15, is provided. The heater 15 is provided on the film layer 10 in a position not overlapping with the temperature sensor 16. The temperature sensor 16 can precisely detect the surface temperature of the flow path wall without being affected by heat of the heater 15.SELECTED DRAWING: Figure 1