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Diffusion barrier for oscillating quartz, measuring assembly for measuring deposition rate and method thereof
Diffusion barrier for oscillating quartz, measuring assembly for measuring deposition rate and method thereof
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机译:用于振荡石英的扩散阻挡层,用于测量沉积速率的测量组件及其方法
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摘要
A detection element for a measurement assembly adapted to measure a deposition rate of an evaporated material on a substrate. The detection element comprising: an oscillation crystal for detecting the deposition rate; and a barrier layer comprising a barrier material covering at least a portion of the oscillation crystal configured to prevent the evaporated material from diffusing into the oscillation crystal.
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