Thermal characteristic evaluation and measurement apparatus and thermal characteristic evaluation and measurement method using the same

摘要

The contact thermal resistance value, thermal resistance value, and thermal conductivity of the measurement object can be measured by the unidirectional heat flux steady comparison method. A highly reliable thermal property evaluation and measurement device that can be applied to measurement analysis technology. The thermal characteristic evaluation and measurement apparatus 1 includes heat sensors 4g1 and 4g2 that detect heat to the measurement sample unit 5, and a heat generation source unit 4 that heats the measurement sample unit 5, a measurement sample unit 5, and a measurement sample unit 5 A thermal characteristic evaluation and measurement device having thermal sensors 6c1 and 6c2 that detect heat from the heat cooling source unit 6 that sequentially cools the measurement sample unit 5, and the measurement sample unit 5 has a thermal characteristic evaluation It has a three-layer structure of the measurement object 5b and the heat conducting materials 5a and 5c sandwiching it, and the heat conducting materials 5a and 5c, the heat generation source unit 4 and the heat cooling source unit 6 promote heat transfer. The thermal property evaluation measurement object 5b and the thermal conductive materials 5a and 5c are in close contact with each other through physical contact, chemical contact, and chemical bond contact.