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Chemical solution, chemical solution container, method of manufacturing chemical solution, and method of manufacturing chemical solution container

机译:化学溶液,化学溶液容器,化学溶液的制造方法以及化学溶液容器的制造方法

摘要

An object of the present invention is to provide a chemical solution which has excellent defect controllability and which is hard to cause breakage of a transfer pipeline provided in an apparatus for manufacturing the chemical solution at the time of manufacturing the chemical solution. Moreover, this invention makes it a subject to also provide the manufacturing method of a chemical | medical solution container, a chemical | medical solution, and the chemical | medical solution container. The chemical solution of the present invention is a chemical solution containing an organic solvent, and ions of at least one atom selected from the group consisting of Fe atoms, Cr atoms, Ni atoms, and Pb atoms, and the When the above kind of ion is contained, the content of the above metal ion is 0.1 to 100 mass ppt, and when two or more kinds of the above ion are contained in the chemical solution, each containing of the above metal ion The amount is 0.1 to 100 mass ppt, and the charging potential is 100 mV or less. 【Selection chart】 None
机译:本发明的目的是提供一种化学溶液,该化学溶液具有优异的缺陷可控性并且在制造化学溶液时难以引起设置在用于制造化学溶液的设备中的输送管线的破裂。另外,本发明的主题还在于提供化学药品的制造方法。医用溶液容器,化学药品|医学溶液和化学药品|医疗溶液容器。本发明的化学溶液是包含有机溶剂和选自由Fe原子,Cr原子,Ni原子和Pb原子组成的组中的至少一个原子的离子和上述离子时的化学溶液。含有上述金属离子时,上述金属离子的含量为0.1〜100质量ppt,在药液中含有两种以上的上述离子时,上述金属离子的含量为0.1〜100质量ppt,充电电位为100 mV以下。 【选型表】无

著录项

  • 公开/公告号JPWO2018061485A1

    专利类型

  • 公开/公告日2019-07-11

    原文格式PDF

  • 申请/专利权人 富士フイルム株式会社;

    申请/专利号JP20180541969

  • 发明设计人 上村 哲也;

    申请日2017-08-07

  • 分类号G03F7/16;C11D7/50;H01L21/304;G03F7/32;

  • 国家 JP

  • 入库时间 2022-08-21 12:18:32

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