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Chemical solution, chemical solution container, method of manufacturing chemical solution, and method of manufacturing chemical solution container
Chemical solution, chemical solution container, method of manufacturing chemical solution, and method of manufacturing chemical solution container
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机译:化学溶液,化学溶液容器,化学溶液的制造方法以及化学溶液容器的制造方法
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摘要
An object of the present invention is to provide a chemical solution which has excellent defect controllability and which is hard to cause breakage of a transfer pipeline provided in an apparatus for manufacturing the chemical solution at the time of manufacturing the chemical solution. Moreover, this invention makes it a subject to also provide the manufacturing method of a chemical | medical solution container, a chemical | medical solution, and the chemical | medical solution container. The chemical solution of the present invention is a chemical solution containing an organic solvent, and ions of at least one atom selected from the group consisting of Fe atoms, Cr atoms, Ni atoms, and Pb atoms, and the When the above kind of ion is contained, the content of the above metal ion is 0.1 to 100 mass ppt, and when two or more kinds of the above ion are contained in the chemical solution, each containing of the above metal ion The amount is 0.1 to 100 mass ppt, and the charging potential is 100 mV or less. 【Selection chart】 None
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