Pulse light generation apparatus, pulse light generation method, exposure apparatus and inspection apparatus provided with pulse light generation apparatus

摘要

An object of the present invention is to generate two types of pulsed light having mutually different time intensity waveforms with a simple configuration. A pulse light generation device includes an optical coupler including at least four input / output ports of a first port, a second port, a third port, and a fourth port, the third port, and the fourth port. And a phase modulation element disposed in the connection optical path, the optical coupler branches the input pulse light input to the first port, and the third port and the third port The first direction pulse light and the second direction pulse light are output to four ports, respectively, and the phase modulation element applies phase modulation to at least one of the first direction pulse light and the second direction pulse light. Output pulse light having different waveforms from each other is output from each of the first port and the second port. [Selected figure] Figure 1