Sensor head for crystal oscillation type film thickness monitor

摘要

Provided is a sensor head for crystal oscillation type film thickness monitoring capable of suppressing step-out of a stepping motor and an increase in excitation current of the motor. The sensor head main body 1 on which the motor Sm is disposed, the plurality of crystal oscillators Co installed on the upper surface, and the holder 2 rotationally driven by the motor, and the sensor head main body attached to cover the upper surface And a mask body 3 in which a film formation window 31 facing one of the quartz oscillators is opened. A first electrode 4 fixed to the portion of the sensor head main body located directly below the film formation window, and a second electrode 5 electrically connected to each crystal oscillator and protruding from the lower surface of the holder; When the holder is rotated to such a phase that the vibrator and the window for film formation coincide in the vertical direction, the first electrode and the second electrode made of the same kind of metal come in contact with each other to conduct electricity. The holder is provided with lubricant supply means 4b provided on the front side in the rotational direction of the holder and supplying a solid lubricant to the surface of the second electrode before coming into contact with the first electrode.