Automatic warehouse before purge with purge function and purge method

摘要

PROBLEM TO BE SOLVED: To purge a carrier and to prevent a problem caused by the leakage of purge gas for an automated warehouse fronting a device and attachable to/detachable from a processing device.SOLUTION: An automated warehouse fronting a device is fitted to store the load port of a processing device, and temporarily stores the carrier of an article shipped in or out of the processing device via a load port. The automated warehouse fronting the device includes a fixed base part, a body part movable between an installation position fitted to the processing device and a maintenance position separated therefrom and including a plurality of shelves, a pipe for supplying purge gas to each shelf, and a transfer device for transferring the carrier between the shelf and the load port, a flexible pipe for supplying the purge gas to the body part, a valve controllable by a controller, a position sensor for detecting the position of the body part, and the controller for opening/closing the valve. The position of the body part is detected by the position sensor, and the valve is closed by the controller for detecting that the body part is not at the installation position.SELECTED DRAWING: Figure 4