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Optical displacement measurement system, imaging condition optimization method and imaging condition optimization program

机译:光学位移测量系统,成像条件优化方法和成像条件优化程序

摘要

There are provided an optical displacement measurement system, an imaging condition optimization method, and an imaging condition optimization program which facilitate setting of an optimal imaging condition. States of a plurality of imaging parameters for setting an imaging condition are set by an imaging setting unit. When the set state of any of the plurality of imaging parameters is changed, a plurality of pieces captured image data according to respective imaging conditions are generated by a light receiving unit. Profile data indicating a profile shape is generated by a profile generation unit based on each piece of generated captured image data. Based on each piece of generated profile data or captured image data corresponding to the profile data, a degree of reliability of a profile shape indicated by the profile data is calculated by a reliability calculation unit.
机译:提供了一种光学位移测量系统,成像条件优化方法和成像条件优化程序,其有助于最佳成像条件的设置。通过成像设置单元来设置用于设置成像条件的多个成像参数的状态。当改变多个成像参数中的任何一个的设置状态时,由光接收单元生成根据各自成像条件的多个拍摄图像数据。由轮廓生成单元基于所生成的每条捕获图像数据来生成指示轮廓形状的轮廓数据。基于每个生成的轮廓数据或与轮廓数据相对应的捕获图像数据,由可靠性计算单元计算由轮廓数据表示的轮廓形状的可靠性程度。

著录项

  • 公开/公告号JP6425586B2

    专利类型

  • 公开/公告日2018-11-21

    原文格式PDF

  • 申请/专利权人 株式会社キーエンス;

    申请/专利号JP20150042172

  • 发明设计人 里吉 寛之;

    申请日2015-03-04

  • 分类号G01B11/24;

  • 国家 JP

  • 入库时间 2022-08-21 12:17:52

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