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Optical displacement measurement system, imaging condition optimization method and imaging condition optimization program
Optical displacement measurement system, imaging condition optimization method and imaging condition optimization program
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机译:光学位移测量系统,成像条件优化方法和成像条件优化程序
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摘要
There are provided an optical displacement measurement system, an imaging condition optimization method, and an imaging condition optimization program which facilitate setting of an optimal imaging condition. States of a plurality of imaging parameters for setting an imaging condition are set by an imaging setting unit. When the set state of any of the plurality of imaging parameters is changed, a plurality of pieces captured image data according to respective imaging conditions are generated by a light receiving unit. Profile data indicating a profile shape is generated by a profile generation unit based on each piece of generated captured image data. Based on each piece of generated profile data or captured image data corresponding to the profile data, a degree of reliability of a profile shape indicated by the profile data is calculated by a reliability calculation unit.
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