Leak test method and simulated leaker for leak test

摘要

The leak test method comprises a leak test process and a simulated leak process. In the leak test step, the hollow workpiece 20 to be tested is sealed in the work capsule 11, the test pressure is supplied from the passage 2a connected to the work capsule 11, and the pressure in the work capsule 11 is blocked in the passage 2a. The fluctuation is detected, and the leak of the work is judged based on the detected output. In the pseudo leakage process, the pseudo leaker 30 having the known pinhole 31a is mounted on the same workpiece 20 'for simulated leak as the workpiece 20 to be tested, and the workpiece 20' for pseudo leak is sealed in the workpiece capsule 11. The test pressure is supplied to the work capsule 11 from the passage 2a, and the passage 2a is shut off, causing the false leak work 20 'to cause a false leak through the false leaker 30, and the work capsule associated with the false leak 11. Detect pressure fluctuation within 11.