YTTRIUM-BASED FLUORIDE THERMAL SPRAY FILM, THERMAL SPRAY MATERIAL FOR FORMING SAID THERMAL SPRAY FILM, AND ANTICORROSION FILM CONTAINING SAID THERMAL SPRAY FILM

摘要

An yttrium fluoride sprayed coating having a thickness of 10-500 μm, an oxygen concentration of 1-6 wt %, and a hardness of 350-470 HV is deposited on a substrate surface. The yttrium fluoride sprayed coating exhibits excellent corrosion resistance in a halogen-base gas atmosphere or halogen-base gas plasma atmosphere, functions to protect the substrate from damage by acid penetration during acid cleaning, and minimizes particle generation from a reaction product and due to spall-off from the coating.