Volume control device, flow rate control system, flow controlling step, program and flow rate controlling method

摘要

PROBLEM TO BE SOLVED: To provide a flow rate controlling device for suppressing hunting at the time of disturbance occurrence.SOLUTION: A flow rate controlling device 5 comprises: a processing unit 51 for, in the case where disturbance occurs, stopping (that is, maintenance of the status quo of flow rate control) output of an operation amount for operating a valve opening degree of a flow rate adjustment valve 3 from a flow rate indication adjuster 4 to the flow rate adjustment valve 3; a correction value computing unit 511 for computing the ratio between a Cv value of the flow rate adjustment valve 3 before disturbance occurrence and a Cv value of the flow rate adjustment valve 3 after disturbance occurrence to obtain a correction value of the operation amount according to the computed ratio; and an addition unit 56 for adding the correction value to the operation amount obtained from the flow rate indication adjuster 4 before stopping output of the operation amount to output the operation amount, to which the correction value is added, to the flow rate adjustment valve 3.SELECTED DRAWING: Figure 1