FOREIGN MATTER REMOVAL METHOD FOR TEMPLATE, PRODUCTION METHOD OF TEMPLATE AND BASE PLATE FOR FOREIGN MATTER REMOVAL

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter removal method for a template which enables removal of foreign matter in a concave part of an uneven structure of a template while suppressing breakage of the template, a production method of the template and a base plate for foreign matter removal.SOLUTION: A foreign matter removal method for a template uses a base plate for foreign matter removal having a base part and a convex part protruding from the base part and comprises arranging a curable material on the upper surface of the convex part, bringing the curable material arranged on the upper surface of the convex part in contact with an irregular structure of a template opposing the curable material and adhered with foreign matter, hardening the curable material and separating the curable material from the template.