Composite substrate including first substrate having first surface, second substrate having second surface facing first surface, and first and second bumps provided at first surface

摘要

A composite substrate includes: a first substrate; a second substrate; an electric contact; a first bump; and a second bump. The first substrate has a first surface. The first substrate has a thickness defining a thickness direction. The second substrate has a second surface. The second surface faces the first surface with a predetermined gap therebetween in the thickness direction. The electric contact is positioned at the second surface. The first bump includes: a core; and a conducting film. The core is provided at the first surface and has a convex shape protruding in the thickness direction. The conducting film covers a part of the core and is in contact with the electric contact. The second bump is provided at the first surface and has a convex shape protruding in the thickness direction. The second bump has a dimension in the thickness direction smaller than that of the first bump.