High performance quartz crystal microbalance enhanced by microstructures for biological applications

摘要

Quartz crystal microbalance resonators are described, as are methods of making them using micron sized pillar array of polymethyl methacrylate fabricated on a QCM surface using a nanoimprint lithography process. Their use in any applications, including for example gas and liquid sensors and biosensors as well as other measurement applications, is also discussed.