Solid state wideband fourier transform infrared spectrometer

摘要

A compact, low cost FTIR spectrometer with no moving parts includes an interferometer having optical paths through silicon waveguides. The optical path lengths are varied by changing the temperature and/or carrier density of at least one of the waveguides. In embodiments, the interferometer is a Mach-Zehnder interferometer. Embodiments vary both optical path lengths in opposite directions. In embodiments, a germanium or InGaAs IR detector is grown on the same wafer as the waveguides. Embodiments include a laser pump, such as a COT CW diode laser, and wavelength mixer, such as an OPGaAs or OPGaP converter, for up and/or down converting measured IR wavelengths into a range compatible with the waveguide and detector materials. The wavelength mixer can be a waveguide. Embodiments include a sample compartment and an IR source such as a glowbar. In embodiments, the sample compartment can be exposed to ambient atmosphere for analysis of gases contained therein.