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Method for inspecting an article and apparatus for measuring the article by multi-photon excitation technique
Method for inspecting an article and apparatus for measuring the article by multi-photon excitation technique
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机译:通过多光子激发技术检查物品的方法和用于测量物品的设备
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摘要
A method for inspecting an article containing a target material is provided. A sampling position of the article is illuminated by a beam of laser light having a wavelength λ. Illumination focus to a focal point at the sampling position of the article to produce molecular excitation of the target material by simultaneous absorption of n incident photons of the beam of laser light, wherein n is equal to or greater than two. An output light exited from the article is analyzed by a detector, wherein the output light is of a wavelength range between 0.8λ and 1.2λ.
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