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Power semiconductor module having a direct copper bonded substrate and an integrated passive component, and an integrated power module

机译:具有直接铜键合衬底和集成无源组件的功率半导体模块以及集成功率模块

摘要

A power semiconductor module includes a direct copper bonded (DCB) substrate having a ceramic substrate, a first copper metallization bonded to a first main surface of the ceramic substrate and a second copper metallization bonded to a second main surface of the ceramic substrate opposite the first main surface. The power semiconductor module further includes a power semiconductor die attached the first copper metallization, a passive component attached the first copper metallization, a first isolation layer encapsulating the power semiconductor die and the passive component, a first structured metallization layer on the first isolation layer, and a first plurality of electrically conductive vias extending through the first isolation layer from the first structured metallization layer to the power semiconductor die and the passive component. An integrated power module and a method of manufacturing the integrated power module are also provided.
机译:功率半导体模块包括具有陶瓷衬底的直接铜键合(DCB)衬底,结合到陶瓷衬底的第一主表面的第一铜金属化层和结合到陶瓷衬底的与第一衬底相对的第二主表面的第二铜金属化层主表面。功率半导体模块还包括:附着有第一铜金属化层的功率半导体管芯;附着有第一铜金属化层的无源部件;封装了功率半导体管芯和无源部件的第一隔离层;在第一隔离层上的第一结构化金属化层;第一多个导电通孔从第一结构化金属化层延伸穿过第一隔离层到达功率半导体管芯和无源部件。还提供了集成功率模块和制造集成功率模块的方法。

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