Multi-layer shear mode PZT microactuator for a disk drive suspension, and method of manufacturing same

摘要

A microactuator for a suspension is described. The microactuator includes a multi-layer PZT device having a first face and an opposite second face. Each layer of the multi-layer PZT device is configured to operate in its d15 mode when actuated by an actuation voltage. The layers are configured as a stack such that each layer is configured to act in the same direction when actuated such that the first face moves in shear relative to the second face.