COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS

摘要

A method of plasma spraying an article comprises providing an article, feeding a liquid precursor solution into a plasma spray deposition system, and generating, with the plasma spray deposition system, a stream directed toward the article. The stream forms a ceramic coating on the article upon contact therewith. The ceramic coating comprises Y₂O₃ and one or more of ZrO₂, Al₂O₃, Er₂O₃, Gd₂O₃, SiO₂, or YF₃.