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MICROMACHINED ULTRASONIC TRANSDUCER (MUT), METHOD FOR MANUFACTURING THE MUT, AND METHOD FOR DESIGNING THE MUT
MICROMACHINED ULTRASONIC TRANSDUCER (MUT), METHOD FOR MANUFACTURING THE MUT, AND METHOD FOR DESIGNING THE MUT
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机译:微机械超声传感器(MUT),制造方法和设计方法
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摘要
A device for emitting an ultrasound acoustic wave in a propagation medium, comprising: a package including a base substrate and a cap coupled to the base substrate and defining therewith a chamber in the package; a semiconductor die, coupled to the base substrate in the chamber, comprising a semiconductor body; a micromachined ultrasonic transducer (MUT) integrated at least in part in the semiconductor body and including a cavity in the semiconductor body and a membrane suspended over the cavity; and an actuator, operatively coupled to the membrane, which can be operated for generating a deflection of the membrane. The membrane is designed in such a way that a resonance frequency thereof matches an acoustic resonance frequency that, during operation of the MUT, develops in said chamber of the package.
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