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FABRICATION OF MULTILAYER NANOGRATING STRUCTURES

机译:多层纳米结构的制造

摘要

Provided are nanograting structures and methods of fabrication thereof that allow for stable, robust gratings and nanostructure embedded gratings that enhance electromagnetic field, fluorescence, and photothermal coupling through surface plasmon or, photonic resonance. The gratings produced exhibit long term stability of the grating structure and improved shelf life without degradation of the properties such as fluorescence enhancement. Embodiments of the invention build nanograting structures layer-by-layer to optimize structural and optical properties and to enhance durability.
机译:提供了纳米光栅结构及其制造方法,其允许稳定,坚固的光栅和纳米结构嵌入式光栅,这些光栅通过表面等离子体激元或光子共振增强电磁场,荧光和光热耦合。所生产的光栅表现出光栅结构的长期稳定性,并改善了保存期限,而不会降低诸如荧光增强之类的性能。本发明的实施方案逐层构建纳米光栅结构以优化结构和光学性能并增强耐久性。

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