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SCANNING EXPOSURE DEVICE, MANUFACTURING METHOD OF SCANNING EXPOSURE DEVICE AND CONTROL METHOD OF SCANNING EXPOSURE DEVICE

机译:扫描曝光设备,扫描曝光设备的制造方法以及扫描曝光设备的控制方法

摘要

A scanning exposure device including: a first and a second light sources emitting a first and second beam, respectively; a polygon mirror having reflecting surfaces; a first and a second optical sensors detecting the first and the second beam, respectively; and a controller storing first writing time until which an exposure by the first beam starts after the first beam is detected and second writing time until which an exposure by the second beam starts after the first beam is detected, for respective reference surface identifiers specifying the respective reflecting surfaces, and the controller acquires a first timing at which the first beam is detected and a second timing at which the second beam is detected for the respective reflecting surfaces identified by respective acquisition surface identifiers; and specifies a correspondence relation between the respective reference surface identifiers and the respective acquisition surface identifiers.
机译:一种扫描曝光装置,包括:分别发射第一光束和第二光束的第一光源和第二光源;具有反射面的多面镜;第一和第二光学传感器分别检测第一和第二光束;以及控制器,其存储用于确定各自的基准面标识符的第一写入时间和直到检测到第一光束之后才开始进行第一光束的曝光的第一写入时间和检测到第一光束之后才开始得到第二光束进行曝光的第二写入时间。控制器获取由各个获取表面标识符所标识的各个反射表面的第一定时和第二定时,第二定时被检测到,第一定时被检测到。并且指定各个参考表面标识符和各个获取表面标识符之间的对应关系。

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